XLA-25-2铝制高真空L型阀常闭/波纹管密封

2023-06-02 作者 dustry003 0

XLA-25-2铝制高真空角阀,常闭/波纹管密封
XLA-25-2是高真空角阀,用于采用高真空和工艺气体的工业应用。可能使用这些角阀的常见行业包括半导体、太阳能和其他电子产品生产,以及食品和制药制造。XLA阀是单作用的,常闭,在轴和弹簧上有一个波纹管密封。当在先导端口施加压力时,阀瓣打开。波纹管组件可以更换,减少维护成本和废料。阀体为硬质阳极氧化A6063铝,带有304不锈钢阀门和波纹管。多种密封材料可用于广泛的化学兼容性。

出色的导热性提供均匀的温度并减少阀内的气体冷凝
对氟气具有高耐腐蚀性
最少的释气
重金属污染最小
可选加热器
可选位置传感器
用于内件的可选草酸阳极氧化

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●采用铝制主体
均一的焙温度
轻量·紧凑
气体溢出少
重金属污染少
●可更换波纹管
字段描述 字段取值 XLA-25-2取值描述
法兰尺寸 25 25
法兰种类 KF(NW)
指示灯及操作通口方向 无指示灯,法兰侧
温度规格/有无加热器 5~60℃,无加热器
磁性开关种类 无磁性开关(无内置磁环)
磁性开关个数/安装位置 数量:无磁性开关;检测位置:-
阀体表面处理 外部:硬质阳极氧化,内部:无处理
密封材质 密封材质:FKM;组合NO.:1349-80
密封材质变更点及泄露量 变更点:无;泄漏量:内部:1.3×10^-10(FKM)Pa·m3/s以下,外部:1.3×10^-11(FKM)Pa·m3/s以下
XLA-25-2 Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal
XLA-25-2 are high vacuum angle valves for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing. XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring. The vavle opens when pressure is applied at the pilot port. The bellows assembly can be replaced, reducing maintenance costs and waste materials. The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows. Numerous seal materials are available for a wide range of chmical compatibility.

Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
High corrosion resistance to fluorine gas
Minimal outgassing
Minimal contamination from heavy metals
Optional heaters
Optional position sensors
Optional oxalic acid anodizing for internals